This Installation and operating manual must be read in its entirety Should the instrument require repair or adjustment, contact the nearest Brooks. Customer Instruction Manual. Brooks Automation. Revision 09. The exclusive remedies for breach of warranty will be either repair or replacement of the Communication manual. Document: Brooks part number: 541-C-053-AAA. 1.3 Description. Models 5860S, 5861S, 5863S and 5864S Brooks Smart Mass Flow Meters are.Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Description :Brooks Fixload 6M Inspection, Repair, Retrofit, Exchange, Overhaul, Spare Parts Vacuum Valve, LP V6 vacuum valve, Brooks Pad Kit.