SECS/GEM Manual for the Surfscan 6220 Tools. KLA-TENCOR SURFSCAN 6220 REFURBISHMENT PROCESS consists of: - Replace used Laser with New Laser. Surfscan 6220. Vintage: KLA-TENCOR SURFSCAN 6220 SURFACE DEFECT INSPECTION SYSTEM consisting of: Operations Manual and Documentation It's optics and capabilities are the next generation for the Surfscan 6000 family. Surfscan 6XY0. 3 Unpatterned Surfscan Product Mix 6220 488nm, 30mW Ar laser Buy or sell a used KLA 6220 on Moov's marketplace. BSI-985>Single Board Computer Replaces Obsolete Trenton OEM CPU • Manual (PDF Format). Operator.