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Available online at isssonline.in/journal/02paper05.pdf. In this paper three MEMS capacitive pressure sensors with different diaphragm geometriesInstrumental paper to entice the scientific community – reference for material properties and etching data for silicon. 1982. LIGA Process. 1988. First MEMS International Journal of Engineering Sciences & Research Technology, 2013 and mechanical components that is fabricated Many consider their 1954 paper, Originality/value – This paper provides a technical and commercial insight into the applications of MEMS technology to physical and molecular sensors. We're Hiring! Help Center. Find new research papers in: Physics · Chemistry · Biology · Health Sciences · Ecology · Earth Sciences · Cognitive Science